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- 87061561 contributor B5428985.
- 87061561 contributor B5428986.
- 87061561 created "c1987.".
- 87061561 date "1987".
- 87061561 date "c1987.".
- 87061561 dateCopyrighted "c1987.".
- 87061561 description "Includes bibliographies and index.".
- 87061561 extent "x, 211 p. :".
- 87061561 identifier "089252846X (pbk.)".
- 87061561 isPartOf "Proceedings / SPIE ; v. 811".
- 87061561 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 811.".
- 87061561 issued "1987".
- 87061561 issued "c1987.".
- 87061561 language "eng".
- 87061561 publisher "Bellingham, Wash., USA : SPIE-the International Society for Optical Engineering,".
- 87061561 subject "621.381/73 19".
- 87061561 subject "Integrated circuits Design and construction Congresses.".
- 87061561 subject "Microlithography Congresses.".
- 87061561 subject "TK7874 .O66 1987".
- 87061561 title "Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, The Hague, The Netherlands / Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique ... [et al.].".
- 87061561 type "text".