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- 87080539 alternative "Multilevel metallization, interconnection, and contact technologies.".
- 87080539 contributor B5434564.
- 87080539 contributor B5434565.
- 87080539 contributor B5434566.
- 87080539 created "c1987.".
- 87080539 date "1987".
- 87080539 date "c1987.".
- 87080539 dateCopyrighted "c1987.".
- 87080539 description "Includes bibliographies and indexes.".
- 87080539 extent "vii, 272 p. :".
- 87080539 isPartOf "Proceedings (Electrochemical Society ; v. 87-4.".
- 87080539 isPartOf "Proceedings / the Electrochemical Society ; v. 87-4".
- 87080539 issued "1987".
- 87080539 issued "c1987.".
- 87080539 language "eng".
- 87080539 publisher "Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, Inc.,".
- 87080539 subject "621.381/73 19".
- 87080539 subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- 87080539 subject "Metallizing Congresses.".
- 87080539 subject "TK7874 .S94 1986".
- 87080539 title "Proceedings of the Symposium on Multilevel Metallization, Interconnection, and Contact Technologies / edited by L. B. Rothman, T. Herndon.".
- 87080539 type "text".