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- 87082368 alternative "Silicon nitride and silicon dioxide thin insulating films.".
- 87082368 contributor B5436243.
- 87082368 contributor B5436244.
- 87082368 contributor B5436245.
- 87082368 created "c1987.".
- 87082368 date "1987".
- 87082368 date "c1987.".
- 87082368 dateCopyrighted "c1987.".
- 87082368 description "Includes bibliographies and indexes.".
- 87082368 extent "x, 550 p. :".
- 87082368 isPartOf "Proceedings (Electrochemical Society) ; v. 87-10.".
- 87082368 isPartOf "Proceedings / Electrochemical Society ; v. 87-10".
- 87082368 issued "1987".
- 87082368 issued "c1987.".
- 87082368 language "eng".
- 87082368 publisher "Pennington, NJ (10 S. Main St., Pennington 08534-2696 : Electrochemical Society),".
- 87082368 subject "621.381/73 19".
- 87082368 subject "Electric insulators and insulation Thin films Congresses.".
- 87082368 subject "Silicon dioxide Congresses.".
- 87082368 subject "Silicon nitride Congresses.".
- 87082368 subject "TK7872.T55 S94 1986".
- 87082368 subject "Thin film devices Congresses.".
- 87082368 title "Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / edited by Vik J. Kapoor, Kevin T. Hankins ; [sponsored by the] Dielectrics and Insulation and Electronics Divisions.".
- 87082368 type "text".