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- 87082381 contributor B5436260.
- 87082381 contributor B5436261.
- 87082381 contributor B5436262.
- 87082381 created "c1987.".
- 87082381 date "1987".
- 87082381 date "c1987.".
- 87082381 dateCopyrighted "c1987.".
- 87082381 description "Includes bibliographies and indexes.".
- 87082381 extent "xi, 840 p. :".
- 87082381 isPartOf "Proceedings (Electrochemical Society) ; v. 87-11.".
- 87082381 isPartOf "Proceedings / The Electrochemical Society ; v. 87-11".
- 87082381 issued "1987".
- 87082381 issued "c1987.".
- 87082381 language "eng".
- 87082381 publisher "Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society,".
- 87082381 subject "621.381/73 19".
- 87082381 subject "Integrated circuits Ultra large scale integration Congresses.".
- 87082381 subject "TK7874 .I5925 1987".
- 87082381 title "ULSI science and technology/1987 : proceedings of the First International Symposium on Ultra Large Scale Integration Science and Technology / edited by S. Broydo, C.M. Osburn ; assistant editors, J.M. Andrews ... [et al.].".
- 87082381 type "text".