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- 87101281 contributor B5439865.
- 87101281 created "1986.".
- 87101281 date "1986".
- 87101281 date "1986.".
- 87101281 dateCopyrighted "1986.".
- 87101281 extent "262 p. :".
- 87101281 isPartOf "V--dli︠a︡ vuzov".
- 87101281 issued "1986".
- 87101281 issued "1986.".
- 87101281 language "rus".
- 87101281 subject "MLCM 93/08568 (T)".
- 87101281 subject "Semiconductors".
- 87101281 title "Oborudovanie poluprovodnikovogo proizvodstva / I.G. Blinov, L.V. Kozhitov.".
- 87101281 type "text".