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- 87205674 contributor B5537260.
- 87205674 created "1987.".
- 87205674 date "1987".
- 87205674 date "1987.".
- 87205674 dateCopyrighted "1987.".
- 87205674 description "Includes bibliographical references.".
- 87205674 extent "149 p. :".
- 87205674 isPartOf "Trudy Instituta obshcheĭ fiziki ; t. 8".
- 87205674 issued "1987".
- 87205674 issued "1987.".
- 87205674 language "rus".
- 87205674 subject "Lithography.".
- 87205674 subject "Printed circuits Design and construction.".
- 87205674 subject "TK7868.P7 P765 1987".
- 87205674 title "Problemy litografii v mikroėlektronike / otvetstvennyĭ redaktor toma T.M. Makhviladze.".
- 87205674 type "text".