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- 88005363 contributor B5611508.
- 88005363 contributor B5611509.
- 88005363 created "c1988.".
- 88005363 date "1988".
- 88005363 date "c1988.".
- 88005363 dateCopyrighted "c1988.".
- 88005363 description "Includes bibliographies and indexes.".
- 88005363 extent "xv, 509 p. :".
- 88005363 identifier "0931837693".
- 88005363 isPartOf "Materials Research Society symposia proceedings ; v. 101.".
- 88005363 isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 101".
- 88005363 issued "1988".
- 88005363 issued "c1988.".
- 88005363 language "eng".
- 88005363 publisher "Pittsburgh, Pa. : Materials Research Society,".
- 88005363 subject "621.381/7 19".
- 88005363 subject "Integrated circuits Design and construction Congresses.".
- 88005363 subject "Lasers Industrial applications Congresses.".
- 88005363 subject "Lasers in chemistry Congresses.".
- 88005363 subject "TK7874 .L297 1988".
- 88005363 title "Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. / editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko.".
- 88005363 type "text".