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- 88006382 contributor B5612737.
- 88006382 created "c1988.".
- 88006382 date "1988".
- 88006382 date "c1988.".
- 88006382 dateCopyrighted "c1988.".
- 88006382 description "Includes bibliographies and index.".
- 88006382 extent "ix, 498 p. :".
- 88006382 identifier "0127806210".
- 88006382 issued "1988".
- 88006382 issued "c1988.".
- 88006382 language "eng".
- 88006382 publisher "Boston : Academic Press,".
- 88006382 subject "539/.6 19".
- 88006382 subject "Ion implantation.".
- 88006382 subject "QC702.7.I55 I59 1988".
- 88006382 title "Ion implantation : science and technology / edited by J.F. Ziegler.".
- 88006382 type "text".