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- 88008927 contributor B5615712.
- 88008927 contributor B5615713.
- 88008927 created "c1988.".
- 88008927 date "1988".
- 88008927 date "c1988.".
- 88008927 dateCopyrighted "c1988.".
- 88008927 description "Includes bibliographies and indexes.".
- 88008927 extent "xi, 369 p. :".
- 88008927 identifier "093183774X".
- 88008927 isPartOf "Materials Research Society symposia proceedings ; v. 106.".
- 88008927 isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 106".
- 88008927 issued "1988".
- 88008927 issued "c1988.".
- 88008927 language "eng".
- 88008927 publisher "Pittsburgh, Pa. : Materials Research Society,".
- 88008927 subject "620.1/93 19".
- 88008927 subject "Integrated circuits Materials Congresses.".
- 88008927 subject "Silicon Electric properties Congresses.".
- 88008927 subject "TK7871.15.S55 P65 1988".
- 88008927 title "Polysilicon films and interfaces : symposium held December 1-3, 1987, Boston, Massachusetts, U.S.A. / editors, C.Y. Wong, C.V. Thompson, K.N. Tu.".
- 88008927 type "text".