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- 88071762 contributor B5662110.
- 88071762 contributor B5662111.
- 88071762 contributor B5662112.
- 88071762 created "c1988.".
- 88071762 date "1988".
- 88071762 date "c1988.".
- 88071762 dateCopyrighted "c1988.".
- 88071762 description "Includes bibliographical references.".
- 88071762 extent "ix, 205 p. :".
- 88071762 identifier "0871703300".
- 88071762 issued "1988".
- 88071762 issued "c1988.".
- 88071762 language "eng".
- 88071762 publisher "Metals Park, Ohio : ASM International,".
- 88071762 subject "671.73".
- 88071762 subject "Ion bombardment Industrial applications Congresses.".
- 88071762 subject "Ion implantation Congresses.".
- 88071762 subject "Metals Finishing Congresses.".
- 88071762 subject "Plasma (Ionized gases) Industrial applications Congresses.".
- 88071762 subject "TS695.25 .C66 1988".
- 88071762 title "Ion implantation and plasma assisted processes : proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988 / edited by Robert F. Hochman, Hillary Solnick-Legg, Keith O. Legg ; sponsored by the Ion Implantation Committee and the Plasma Processes Committee of the Surface Treating and Coating Division of ASM International.".
- 88071762 type "text".