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- 88080690 contributor B5663236.
- 88080690 contributor B5663237.
- 88080690 contributor B5663238.
- 88080690 created "c1988.".
- 88080690 date "1988".
- 88080690 date "c1988.".
- 88080690 dateCopyrighted "c1988.".
- 88080690 description "Includes bibliographies and index.".
- 88080690 extent "viii, 347 p. :".
- 88080690 isPartOf "Proceedings (Electrochemical Society) ; v. 88-7.".
- 88080690 isPartOf "Proceedings / Electrochemical Society ; v. 88-7".
- 88080690 issued "1988".
- 88080690 issued "c1988.".
- 88080690 language "eng".
- 88080690 publisher "Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society,".
- 88080690 subject "621.3815/2 19".
- 88080690 subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- 88080690 subject "Plasma etching Congresses.".
- 88080690 subject "Semiconductors Design and construction Congresses.".
- 88080690 subject "TK7871.85 .S955 1987".
- 88080690 subject "Vapor-plating Congresses.".
- 88080690 title "Proceedings of the Symposium on Dry Process / edited by Jun-ichi Nishizawa ... [et al.].".
- 88080690 type "text".