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- 88081197 alternative "Automated integrated circuits manufacturing.".
- 88081197 contributor B5663649.
- 88081197 contributor B5663650.
- 88081197 contributor B5663651.
- 88081197 created "c1988.".
- 88081197 date "1988".
- 88081197 date "c1988.".
- 88081197 dateCopyrighted "c1988.".
- 88081197 description "Includes bibliographies and indexes.".
- 88081197 extent "viii, 484 p. :".
- 88081197 isPartOf "Proceedings (Electrochemical Society) ; v. 88-13.".
- 88081197 isPartOf "Proceedings / Electrochemical Society ; v. 88-13".
- 88081197 issued "1988".
- 88081197 issued "c1988.".
- 88081197 language "eng".
- 88081197 publisher "Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society,".
- 88081197 subject "621.381/73 19".
- 88081197 subject "Integrated circuits Design and construction Data processing Congresses.".
- 88081197 subject "TK7874 .S884 1987".
- 88081197 title "Proceedings of the Third Symposium on Automated Integrated Circuits Manufacturing / edited by Joseph B. Anthony ; assistant editors, Mihir Parikh, Vaughn Akins, Robert Miller.".
- 88081197 type "text".