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- 88082409 alternative "Advanced materials for ULSI.".
- 88082409 contributor B5664689.
- 88082409 contributor B5664690.
- 88082409 contributor B5664691.
- 88082409 created "c1988.".
- 88082409 date "1988".
- 88082409 date "c1988.".
- 88082409 dateCopyrighted "c1988.".
- 88082409 description "Includes bibliographies and index.".
- 88082409 extent "vi, 246 p. :".
- 88082409 isPartOf "Proceedings (Electrochemical Society) ; v. 88-19.".
- 88082409 isPartOf "Proceedings / Electrochemical Society ; v. 88-19".
- 88082409 issued "1988".
- 88082409 issued "c1988.".
- 88082409 language "eng".
- 88082409 publisher "Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society,".
- 88082409 subject "621.39/5 20".
- 88082409 subject "Integrated circuits Ultra large scale integration Congresses.".
- 88082409 subject "TK7874 .I59238 1988".
- 88082409 title "Proceedings of the First International Symposium on Advanced Materials for ULSI / edited by Martin Scott, Yoichi Akasaka, Rafael Reif.".
- 88082409 type "text".