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- 88141378 contributor B5710757.
- 88141378 contributor B5710758.
- 88141378 created "c1984.".
- 88141378 date "1984".
- 88141378 date "c1984.".
- 88141378 dateCopyrighted "c1984.".
- 88141378 description "Includes bibliographies and indexes.".
- 88141378 extent "272, viii p. :".
- 88141378 identifier "0931288347".
- 88141378 issued "1984".
- 88141378 issued "c1984.".
- 88141378 language "eng".
- 88141378 publisher "AMF O'Hare [Chicago], IL. U.S.A. : Scanning Electron Microscopy,".
- 88141378 subject "535/.3325 19".
- 88141378 subject "Electron microscopy Congresses.".
- 88141378 subject "Electron optics Congresses.".
- 88141378 subject "Magnetic lenses Congresses.".
- 88141378 subject "Microchemistry Congresses.".
- 88141378 subject "Microlithography Congresses.".
- 88141378 subject "QC793.5.E62 P44 1984".
- 88141378 title "Electron optical systems for microscopy, microanalysis & microlithography : proceedings of the 3rd Pfefferkorn Conference, held April 9 to 14, 1984, at the Carousel Hotel, Ocean City, MD / edited by John J. Hren ... [et al.] ; managing editor, Sudha A. Bhatt.".
- 88141378 type "text".