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- 88600591 contributor B5796369.
- 88600591 contributor B5796370.
- 88600591 created "1988.".
- 88600591 date "1988".
- 88600591 date "1988.".
- 88600591 dateCopyrighted "1988.".
- 88600591 description "Includes bibliographical references.".
- 88600591 extent "x, 37 p. :".
- 88600591 isPartOf "NIST special publication ; 260-109".
- 88600591 isPartOf "Standard reference materials".
- 88600591 issued "1988".
- 88600591 issued "1988.".
- 88600591 language "eng".
- 88600591 publisher "Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology ; Washington, DC : For sale by the Supt. of Docs., U.S. G.P.O.,".
- 88600591 subject "Ellipsometry Evaluation Mathematical models.".
- 88600591 subject "QC100 .U57 no. 260-109".
- 88600591 subject "Refractive index.".
- 88600591 subject "Silica.".
- 88600591 subject "Silicon.".
- 88600591 title "Preparation and certification of SRM-2530, ellipsometric parameters [delta] and [psi] and derived thickness and refractive index of a silicon dioxide layer on silicon / G.A. Candela ... [et al.].".
- 88600591 type "text".