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- 89017931 contributor B5860893.
- 89017931 contributor B5860894.
- 89017931 created "1989.".
- 89017931 date "1989".
- 89017931 date "1989.".
- 89017931 dateCopyrighted "1989.".
- 89017931 description "Includes bibliographical references.".
- 89017931 extent "xii, 449 p. :".
- 89017931 identifier "0841217017 (alk. paper)".
- 89017931 identifier 89017931-d.html.
- 89017931 identifier 89017931-t.html.
- 89017931 isPartOf "ACS symposium series, 0097-6156 ; 412".
- 89017931 issued "1989".
- 89017931 issued "1989.".
- 89017931 language "eng".
- 89017931 publisher "Washington, DC : American Chemical Society,".
- 89017931 subject "621.381/531 20".
- 89017931 subject "Microlithography Materials Congresses.".
- 89017931 subject "Photoresists Congresses.".
- 89017931 subject "Polymers Congresses.".
- 89017931 subject "TK7871.15.P6 P635 1989".
- 89017931 title "Polymers in microlithography : materials and processes / Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor.".
- 89017931 type "text".