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- 89018267 contributor B5861353.
- 89018267 created "c1990.".
- 89018267 date "1990".
- 89018267 date "c1990.".
- 89018267 dateCopyrighted "c1990.".
- 89018267 description "Includes bibliographical references and index.".
- 89018267 extent "xiii, 528 p. :".
- 89018267 identifier "0122004302 (acid-free paper)".
- 89018267 identifier 89018267.html.
- 89018267 identifier 89018267.html.
- 89018267 isPartOf "Plasma--materials interactions".
- 89018267 issued "1990".
- 89018267 issued "c1990.".
- 89018267 language "eng".
- 89018267 publisher "Boston : Academic Press,".
- 89018267 subject "668.9 20".
- 89018267 subject "Plasma engineering.".
- 89018267 subject "Plasma etching.".
- 89018267 subject "Plasma polymerization.".
- 89018267 subject "Polymers.".
- 89018267 subject "TA455.P58 P58 1990".
- 89018267 title "Plasma deposition, treatment, and etching of polymers / edited by Riccardo d'Agostino.".
- 89018267 type "text".