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- 89043524 contributor B5886800.
- 89043524 contributor B5886801.
- 89043524 created "c1990.".
- 89043524 date "1990".
- 89043524 date "c1990.".
- 89043524 dateCopyrighted "c1990.".
- 89043524 description "Includes bibliographical references and index.".
- 89043524 extent "vi, 196 p. :".
- 89043524 identifier "0819402249".
- 89043524 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 1188".
- 89043524 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1188.".
- 89043524 issued "1990".
- 89043524 issued "c1990.".
- 89043524 language "eng".
- 89043524 publisher "Bellingham, Wash., USA : The Society,".
- 89043524 subject "621.381 20".
- 89043524 subject "Electronics Materials Congresses.".
- 89043524 subject "Integrated circuits Very large scale integration Design and construction Congresses.".
- 89043524 subject "Semiconductors Congresses.".
- 89043524 subject "TK7871 .M85 1990".
- 89043524 title "Multichamber and in-situ processing of electronic materials : 10-11 October 1989, Santa Clara, California / Robert S. Freund, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.".
- 89043524 type "text".