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- 89043525 contributor B5886802.
- 89043525 contributor B5886803.
- 89043525 created "c1990.".
- 89043525 date "1989".
- 89043525 date "c1990.".
- 89043525 dateCopyrighted "c1990.".
- 89043525 description "Includes bibliographical references and index.".
- 89043525 extent "vi, 204 p. :".
- 89043525 identifier "0819402257".
- 89043525 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 1189".
- 89043525 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1189.".
- 89043525 issued "1989".
- 89043525 issued "c1990.".
- 89043525 language "eng".
- 89043525 publisher "Bellingham, Wash., USA : SPIE,".
- 89043525 subject "621.381/52 20".
- 89043525 subject "Semiconductor doping Congresses.".
- 89043525 subject "Semiconductors Heat treatment Congresses.".
- 89043525 subject "TK7871.85 .R343 1990".
- 89043525 subject "Vapor plating Congresses.".
- 89043525 title "Rapid isothermal processing : 12-13 October 1989, Santa Clara, California / Rajendra Singh, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison, SEMATECH.".
- 89043525 type "text".