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- 89062616 contributor B5894889.
- 89062616 contributor B5894890.
- 89062616 contributor B5894891.
- 89062616 created "c1989.".
- 89062616 date "1989".
- 89062616 date "c1989.".
- 89062616 dateCopyrighted "c1989.".
- 89062616 description "Includes bibliographical references and index.".
- 89062616 extent "vii, 206 p. :".
- 89062616 identifier "0819401749".
- 89062616 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1138.".
- 89062616 isPartOf "SPIE proceedings series ; v. 1138".
- 89062616 issued "1989".
- 89062616 issued "c1989.".
- 89062616 language "eng".
- 89062616 publisher "Bellingham, Wash., USA : SPIE,".
- 89062616 subject "621.381/5 20".
- 89062616 subject "Integrated circuits Design and construction Congresses.".
- 89062616 subject "Microlithography Congresses.".
- 89062616 subject "TK7874 .E785 1989".
- 89062616 title "Optical microlithography and metrology for microcircuit fabrication : proceedings, ECO2, 27-28 April, 1989, Paris, France / Michel J. Lacombat, Steve Wittekoek, chairs/editors.".
- 89062616 type "text".