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- 89082431 alternative "IEEE micro electro mechanical systems workshop.".
- 89082431 contributor B5902575.
- 89082431 contributor B5902576.
- 89082431 created "c1990.".
- 89082431 date "1990".
- 89082431 date "c1990.".
- 89082431 dateCopyrighted "c1990.".
- 89082431 description "Includes bibliographical references and indexes.".
- 89082431 extent "xiii, 226 p. :".
- 89082431 issued "1990".
- 89082431 issued "c1990.".
- 89082431 language "eng".
- 89082431 publisher "New York, NY : IEEE,".
- 89082431 subject "621.3 20".
- 89082431 subject "Electromechanical devices Congresses.".
- 89082431 subject "Microelectronics Congresses.".
- 89082431 subject "Miniature objects Congresses.".
- 89082431 subject "Robotics Congresses.".
- 89082431 subject "TK153 .M468 1990".
- 89082431 title "Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings / IEEE, Napa Valley, California, 11-14, February 1990 ; sponsored by the IEEE Robotics and Automation Society, and in cooperation with the ASME Dynamic Systems and Control Division.".
- 89082431 type "text".