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- 89083899 alternative "Silicon nitride and silicon dioxide thin insulating films.".
- 89083899 contributor B5903374.
- 89083899 contributor B5903375.
- 89083899 contributor B5903376.
- 89083899 created "c1989.".
- 89083899 date "1989".
- 89083899 date "c1989.".
- 89083899 dateCopyrighted "c1989.".
- 89083899 description "Includes bibliographical references.".
- 89083899 extent "vii, 455 p. :".
- 89083899 isPartOf "Proceedings (Electrochemical Society) ; v. 89-7.".
- 89083899 isPartOf "Proceedings / Electrochemical Society ; v. 89-7".
- 89083899 issued "1989".
- 89083899 issued "c1989.".
- 89083899 language "eng".
- 89083899 publisher "Pennington, NJ : Electrochemical Society,".
- 89083899 subject "621.381/52 20".
- 89083899 subject "Electric insulators and insulation Thin films Congresses.".
- 89083899 subject "Silicon dioxide Congresses.".
- 89083899 subject "Silicon nitride Congresses.".
- 89083899 subject "TK7872.T55 S94 1988".
- 89083899 subject "Thin film devices Congresses.".
- 89083899 title "Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / edited by Steven B. Bibyk ... [et al.] ; Dielectrics and Insulation, and Electronics, and High Temperature Materials Divisions.".
- 89083899 type "text".