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- 89116745 contributor B5924503.
- 89116745 contributor B5924504.
- 89116745 created "1988.".
- 89116745 date "1988".
- 89116745 date "1988.".
- 89116745 dateCopyrighted "1988.".
- 89116745 description "Bibliography: p. 163-167.".
- 89116745 extent "xiii, 222 p. :".
- 89116745 identifier "044442878X".
- 89116745 isPartOf "Plasma technology ; 2".
- 89116745 issued "1988".
- 89116745 issued "1988.".
- 89116745 language "eng".
- 89116745 publisher "Amsterdam ; New York : Elsevier,".
- 89116745 subject "671.7/35 20".
- 89116745 subject "TS695 .D88 1988".
- 89116745 subject "Vacuum microelectronics.".
- 89116745 subject "Vapor-plating.".
- 89116745 title "High vacuum production in the microelectronics industry / Pierre Duval.".
- 89116745 type "text".