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- 89133083 contributor B5942440.
- 89133083 created "1988.".
- 89133083 date "1988".
- 89133083 date "1988.".
- 89133083 dateCopyrighted "1988.".
- 89133083 description "Includes bibliographical references.".
- 89133083 extent "169 p. :".
- 89133083 identifier "5020007234".
- 89133083 isPartOf "Trudy Instituta obshcheĭ fiziki, 0233-9390 ; t. 14".
- 89133083 issued "1988".
- 89133083 issued "1988.".
- 89133083 language "rus".
- 89133083 subject "Integrated circuits Design and construction.".
- 89133083 subject "TK7874 .T433 1988".
- 89133083 title "Tekhnologicheskie problemy mikroėlektroniki / otvetstvennye redaktory toma T.M. Makhviladze, A.V. Rakov.".
- 89133083 type "text".