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- 89148401 alternative "Chemical vapour deposition.".
- 89148401 alternative "Euro CVD Four.".
- 89148401 contributor B5958658.
- 89148401 contributor B5958659.
- 89148401 created "c1983.".
- 89148401 date "1983".
- 89148401 date "c1983.".
- 89148401 dateCopyrighted "c1983.".
- 89148401 description "Includes bibliographical references and index.".
- 89148401 extent "586 p. :".
- 89148401 issued "1983".
- 89148401 issued "c1983.".
- 89148401 language "eng".
- 89148401 publisher "Eindhoven, Netherlands : Philips Centre for Manufacturing Technology,".
- 89148401 subject "671.7/35 20".
- 89148401 subject "Plasma-enhanced chemical vapor deposition Congresses.".
- 89148401 subject "TS695.15 .E87 1983".
- 89148401 title "Proceedings of the Fourth European Conference on Chemical Vapour Deposition, 1983 : Euro CVD Four at Philips Congress Centre, Eindhoven, The Netherlands, May 31st-June 2nd / edited by J. Bloem, G. Verspui, L.R. Wolff.".
- 89148401 type "text".