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- 89167408 contributor B5978780.
- 89167408 created "c1988.".
- 89167408 date "1988".
- 89167408 date "c1988.".
- 89167408 dateCopyrighted "c1988.".
- 89167408 description "Includes bibliographical references.".
- 89167408 extent "134 p. :".
- 89167408 identifier "3180907207".
- 89167408 isPartOf "VDI Berichte, 0083-5560 ; 720".
- 89167408 isPartOf "VDI-Berichte ; 720.".
- 89167408 issued "1988".
- 89167408 issued "c1988.".
- 89167408 language "ger".
- 89167408 publisher "Düsseldorf : VDI Verlag,".
- 89167408 subject "620 s 621.381/5 20".
- 89167408 subject "Integrated circuits Masks Congresses.".
- 89167408 subject "TA3 .V15 Nr. 720 TK7872.M3".
- 89167408 title "Maskentechnik für Mikroelektronik-Bausteine : Tagung München, 9. November 1988 / VDI/VDE-Gesellschaft Feinwerktechnik.".
- 89167408 type "text".