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- 89182684 contributor B5994697.
- 89182684 created "1989.".
- 89182684 date "1989".
- 89182684 date "1989.".
- 89182684 dateCopyrighted "1989.".
- 89182684 description "Includes bibliographical references (p. 316-[324]).".
- 89182684 extent "326 p. :".
- 89182684 identifier "5283039390 :".
- 89182684 issued "1989".
- 89182684 issued "1989.".
- 89182684 language "rus".
- 89182684 publisher "Moskva : Ėnergoatomizdat,".
- 89182684 subject "Integrated circuits.".
- 89182684 subject "Plasma (Ionized gases)".
- 89182684 subject "TK7874 .D353 1989".
- 89182684 title "Primenenie nizkotemperaturnoĭ plazmy dli︠a︡ nanesenii︠a︡ tonkikh plenok / B.S. Danilin.".
- 89182684 type "text".