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- 89208549 contributor B6021973.
- 89208549 created "1989.".
- 89208549 date "1989".
- 89208549 date "1989.".
- 89208549 dateCopyrighted "1989.".
- 89208549 description "Includes bibliographical references (p. [116]-123).".
- 89208549 extent "123 p. :".
- 89208549 identifier "0387514570 (U.S.) :".
- 89208549 isPartOf "IPA-IAO Forschung und Praxis ; Bd. 138".
- 89208549 issued "1989".
- 89208549 issued "1989.".
- 89208549 language "ger".
- 89208549 publisher "Berlin ; New York : Springer-Verlag,".
- 89208549 subject "621.381 20".
- 89208549 subject "Contamination (Technology)".
- 89208549 subject "Electronic apparatus and appliances Design and construction.".
- 89208549 subject "Semiconductors.".
- 89208549 subject "TK7836 .H47 1989".
- 89208549 title "Verfahren zur Prüfung der Partikelkontamination in Versorgungssystemen für hochreine Flüssigkeiten / Rolf Herz.".
- 89208549 type "text".