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- 90006543 contributor B6094242.
- 90006543 created "c1990.".
- 90006543 date "1990".
- 90006543 date "c1990.".
- 90006543 dateCopyrighted "c1990.".
- 90006543 description "Includes bibliographical references and indexes.".
- 90006543 extent "ix, 250 p. :".
- 90006543 identifier "1558990534".
- 90006543 isPartOf "Materials Research Society symposia proceedings ; v. 165.".
- 90006543 isPartOf "Materials Research Society symposium proceedings ; v. 165".
- 90006543 issued "1990".
- 90006543 issued "c1990.".
- 90006543 language "eng".
- 90006543 publisher "Pittsburgh, Pa. : Materials Research Society,".
- 90006543 subject "621.381/52 20".
- 90006543 subject "Integrated circuits Design and construction Congresses.".
- 90006543 subject "Plasma-enhanced chemical vapor deposition Congresses.".
- 90006543 subject "TS695.15 .C47 1990".
- 90006543 title "Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A. / editors, Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess.".
- 90006543 type "text".