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- 90023646 contributor B6108870.
- 90023646 created "c1991.".
- 90023646 date "1991".
- 90023646 date "c1991.".
- 90023646 dateCopyrighted "c1991.".
- 90023646 description "Includes bibliographical references and index.".
- 90023646 extent "xxii, 649 p. :".
- 90023646 identifier "0815512813 :".
- 90023646 identifier 90023646.html.
- 90023646 isPartOf "Materials science and process technology series".
- 90023646 issued "1991".
- 90023646 issued "c1991.".
- 90023646 language "eng".
- 90023646 publisher "Park Ridge, N.J., U.S.A. : Noyes Publications,".
- 90023646 subject "621.381/531 20".
- 90023646 subject "Integrated circuits Very large scale integration.".
- 90023646 subject "Microlithography.".
- 90023646 subject "TK7874 .H3494 1991".
- 90023646 title "Handbook of VLSI microlithography : principles, technology, and applications / edited by William B. Glendinning, John N. Helbert.".
- 90023646 type "text".