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- 90026768 contributor B6112511.
- 90026768 contributor B6112512.
- 90026768 contributor B6112513.
- 90026768 created "c1991.".
- 90026768 date "1991".
- 90026768 date "c1991.".
- 90026768 dateCopyrighted "c1991.".
- 90026768 description "Includes bibliographical references and index.".
- 90026768 extent "xii, 277 p. :".
- 90026768 identifier "0792311124 (acid-free paper)".
- 90026768 isPartOf "NATO ASI series. Series E, Applied sciences ; no. 193.".
- 90026768 isPartOf "NATO ASI series. Series E, Applied sciences ; vol. 193".
- 90026768 issued "1991".
- 90026768 issued "c1991.".
- 90026768 language "eng".
- 90026768 publisher "Dordrecht ; Boston : Kluwer Academic,".
- 90026768 subject "621.3815 20".
- 90026768 subject "Integrated circuits Materials Congresses.".
- 90026768 subject "Silicon crystals Congresses.".
- 90026768 subject "Silicon-on-insulator technology Congresses.".
- 90026768 subject "TK7874 .N3345 1989".
- 90026768 title "Novel silicon based technologies / edited by R.A. Levy.".
- 90026768 type "text".