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- 90049544 contributor B6138024.
- 90049544 created "c1991.".
- 90049544 date "1991".
- 90049544 date "c1991.".
- 90049544 dateCopyrighted "c1991.".
- 90049544 description "Includes bibliographical references and indexes.".
- 90049544 extent "x, 529 p. :".
- 90049544 identifier "0890065012".
- 90049544 isPartOf "The Artech House materials science library".
- 90049544 issued "1991".
- 90049544 issued "c1991.".
- 90049544 language "eng".
- 90049544 publisher "Boston : Artech House,".
- 90049544 subject "621.381/52 20".
- 90049544 subject "Electric contacts.".
- 90049544 subject "Metallizing.".
- 90049544 subject "Semiconductor-metal boundaries.".
- 90049544 subject "TK7872.C68 V58 1991".
- 90049544 title "VLSI metallization : physics and technologies / Krishna Shenai, editor.".
- 90049544 type "text".