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- 90050808%2F%2Fr94 contributor B6139312.
- 90050808%2F%2Fr94 contributor B6139313.
- 90050808%2F%2Fr94 created "c1991-<c1993>".
- 90050808%2F%2Fr94 date "1991".
- 90050808%2F%2Fr94 date "c1991-<c1993>".
- 90050808%2F%2Fr94 dateCopyrighted "c1991-<c1993>".
- 90050808%2F%2Fr94 description "Includes bibliographical references and indexes.".
- 90050808%2F%2Fr94 extent "v. <1-2 > :".
- 90050808%2F%2Fr94 identifier "0819404616 (v. 1)".
- 90050808%2F%2Fr94 identifier "0819410012 (v. 2)".
- 90050808%2F%2Fr94 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 1392, <1803 >".
- 90050808%2F%2Fr94 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1392, etc.".
- 90050808%2F%2Fr94 issued "1991".
- 90050808%2F%2Fr94 issued "c1991-<c1993>".
- 90050808%2F%2Fr94 language "eng".
- 90050808%2F%2Fr94 publisher "Bellingham, Wash., USA : SPIE,".
- 90050808%2F%2Fr94 subject "621.381/5 20".
- 90050808%2F%2Fr94 subject "Integrated circuits Design and construction Congresses.".
- 90050808%2F%2Fr94 subject "TK7874 .A3375 1991".
- 90050808%2F%2Fr94 title "Advanced techniques for integrated circuit processing / James Bondur, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 90050808%2F%2Fr94 type "text".