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- 90052838 contributor B6139903.
- 90052838 contributor B6139904.
- 90052838 contributor B6139905.
- 90052838 created "c1991.".
- 90052838 date "1991".
- 90052838 date "c1991.".
- 90052838 dateCopyrighted "c1991.".
- 90052838 description "Includes bibliographical references and index.".
- 90052838 extent "xii, 579 p. :".
- 90052838 identifier "0819404047".
- 90052838 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 1343".
- 90052838 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1343.".
- 90052838 issued "1991".
- 90052838 issued "c1991.".
- 90052838 language "eng".
- 90052838 publisher "Bellingham, Wash., USA : SPIE,".
- 90052838 subject "621.36 20".
- 90052838 subject "Coatings Congresses.".
- 90052838 subject "Extreme ultraviolet lithography Congresses.".
- 90052838 subject "Polarimetry Instruments Congresses.".
- 90052838 subject "TA1775 .X19 1991".
- 90052838 subject "X-ray lithography Congresses.".
- 90052838 subject "X-ray optics Instruments Congresses.".
- 90052838 title "X-ray/EUV optics for astronomy, microscopy, polarimetry, and projection lithography : 9-13 July 1990, San Diego, California / Richard B. Hoover, Arthur B.C. Walker, Jr. chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering.".
- 90052838 type "text".