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- 90060894 alternative "Optical/laser microlithography 3.".
- 90060894 alternative "Optical/laser microlithography three.".
- 90060894 contributor B6142871.
- 90060894 contributor B6142872.
- 90060894 created "c1990.".
- 90060894 date "1990".
- 90060894 date "c1990.".
- 90060894 dateCopyrighted "c1990.".
- 90060894 description "Includes bibliographical references and index.".
- 90060894 extent "x, 586 p. :".
- 90060894 identifier "0819403113".
- 90060894 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 1264".
- 90060894 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1264.".
- 90060894 issued "1990".
- 90060894 issued "c1990.".
- 90060894 language "eng".
- 90060894 publisher "Bellingham, Wash., USA : SPIE,".
- 90060894 subject "621.36/6 20".
- 90060894 subject "Lasers Industrial applications Congresses.".
- 90060894 subject "Microlithography Congresses.".
- 90060894 subject "Optical instruments Congresses.".
- 90060894 subject "TA1677 .O68 1990".
- 90060894 title "Optical laser microlithography III : 7-9 March 1990, San Jose, California / Victor Pol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.".
- 90060894 type "text".