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- 90064010 contributor B6145678.
- 90064010 contributor B6145679.
- 90064010 created "c1991.".
- 90064010 date "1991".
- 90064010 date "c1991.".
- 90064010 dateCopyrighted "c1991.".
- 90064010 description "Includes bibliographical references and index.".
- 90064010 extent "vii, 135 p. :".
- 90064010 identifier "0819404446".
- 90064010 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 1377".
- 90064010 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1377.".
- 90064010 issued "1991".
- 90064010 issued "c1991.".
- 90064010 language "eng".
- 90064010 publisher "Bellingham, Wash., USA : SPIE,".
- 90064010 subject "621.36/63 20".
- 90064010 subject "Excimer lasers Congresses.".
- 90064010 subject "TA1695 .E9345 1991".
- 90064010 title "Excimer laser materials processing and beam delivery systems : 8-9 November 1990, Boston, Massachusetts / Bernhard P. Piwczyk, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 90064010 type "text".