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- 90085702 alternative "IEEE micro electro mechanical systems, 1991.".
- 90085702 contributor B6152812.
- 90085702 contributor B6152813.
- 90085702 created "c1991.".
- 90085702 date "1991".
- 90085702 date "c1991.".
- 90085702 dateCopyrighted "c1991.".
- 90085702 description "Includes bibliographical references and indexes.".
- 90085702 extent "xiv, 288 p. :".
- 90085702 identifier "0879426411 (softbound)".
- 90085702 identifier "087942642X (lib. bdg.)".
- 90085702 identifier "0879426438 (microfiche)".
- 90085702 issued "1991".
- 90085702 issued "c1991.".
- 90085702 language "eng".
- 90085702 publisher "New York : Institute of Electrical and Electronics Engineers,".
- 90085702 subject "621.3 20".
- 90085702 subject "Microelectromechanical systems Congresses.".
- 90085702 subject "Miniature objects Congresses.".
- 90085702 subject "Robotics Congresses.".
- 90085702 subject "TK153 .I33 1991".
- 90085702 title "IEEE micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings, Nara, Japan, 30 January-2 February 1991 / sponsored by the IEEE Robotics and Automation Society and in cooperation with the IEE of Japan and the ASME Dynamic Systems and Control Division.".
- 90085702 type "text".