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- 90104599 contributor B6159209.
- 90104599 contributor B6159210.
- 90104599 created "1990.".
- 90104599 date "1990".
- 90104599 date "1990.".
- 90104599 dateCopyrighted "1990.".
- 90104599 description "Includes bibliographical references (p. 252-[276]).".
- 90104599 extent "279 p. :".
- 90104599 identifier "5343005225 :".
- 90104599 issued "1990".
- 90104599 issued "1990.".
- 90104599 language "rus".
- 90104599 subject "Microelectronics.".
- 90104599 subject "Plasma etching.".
- 90104599 subject "TK7874 .P365 1990".
- 90104599 title "Plazmennoe anodirovanie : fizika, tekhnika, primenenie v mikroėlektronike / V.P. Parkhutik, V.A. Labunov.".
- 90104599 type "text".