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- 90122745 contributor B6178324.
- 90122745 created "c1989.".
- 90122745 date "1989".
- 90122745 date "c1989.".
- 90122745 dateCopyrighted "c1989.".
- 90122745 description "Includes bibliographical references.".
- 90122745 extent "217 p. :".
- 90122745 identifier "3180907959".
- 90122745 isPartOf "VDI Berichte, 0083-5560 ; 795".
- 90122745 isPartOf "VDI-Berichte ; 795.".
- 90122745 issued "1989".
- 90122745 issued "c1989.".
- 90122745 language "ger".
- 90122745 publisher "Düsseldorf : VDI Verlag,".
- 90122745 subject "620 s 621.381/5 20".
- 90122745 subject "Integrated circuits Masks Congresses.".
- 90122745 subject "TA3 .V15 Nr. 795 TK7872.M3".
- 90122745 title "Maskentechnik für Mikroelektronik-Bausteine : Tagung München, 9. November 1989 : Tagungsbericht.".
- 90122745 type "text".