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- 90193786 contributor B6252893.
- 90193786 contributor B6252894.
- 90193786 created "1991.".
- 90193786 date "1991".
- 90193786 date "1991.".
- 90193786 dateCopyrighted "1991.".
- 90193786 description "Includes bibliographical references (p. 283-[286]).".
- 90193786 extent "287 p. :".
- 90193786 identifier "5732500014 :".
- 90193786 issued "1991".
- 90193786 issued "1991.".
- 90193786 language "rus".
- 90193786 subject "Integrated circuits.".
- 90193786 subject "Semiconductors.".
- 90193786 subject "TK7871.85 .B3794 1991".
- 90193786 title "Modelirovanie gidromekhanicheskikh prot︠s︡essov v tekhnologii izgotovlenii︠a︡ poluprovodnikovykh priborov i mikroskhem / I.A. Belov, V.A. Shelenshkevich, L.I. Shub.".
- 90193786 type "text".