Matches in Library of Congress for { <http://lccn.loc.gov/91007385> ?p ?o. }
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- 91007385 contributor B6357057.
- 91007385 contributor B6357058.
- 91007385 created "c1991.".
- 91007385 date "1991".
- 91007385 date "c1991.".
- 91007385 dateCopyrighted "c1991.".
- 91007385 description "Includes bibliographical references (p. 157-175) and index.".
- 91007385 extent "xvii, 237 p. :".
- 91007385 identifier "0306438356".
- 91007385 isPartOf "Updates in applied physics and electrical technology".
- 91007385 issued "1991".
- 91007385 issued "c1991.".
- 91007385 language "eng".
- 91007385 publisher "New York : Plenum Press,".
- 91007385 subject "621.381/52 20".
- 91007385 subject "Integrated circuits Very large scale integration Design and construction.".
- 91007385 subject "Plasma etching.".
- 91007385 subject "Semiconductors Etching.".
- 91007385 subject "TK7871.85 .R58 1991".
- 91007385 title "Dry etching for VLSI / A.J. van Roosmalen, J.A.G. Baggerman, S.J.H. Brader.".
- 91007385 type "text".