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- 91041122 contributor B6396377.
- 91041122 created "c1992.".
- 91041122 date "1992".
- 91041122 date "c1992.".
- 91041122 dateCopyrighted "c1992.".
- 91041122 description "Includes bibliographical references and index.".
- 91041122 extent "xi, 493 p. :".
- 91041122 identifier "0306435780".
- 91041122 identifier 91041122-d.html.
- 91041122 identifier 91041122-t.html.
- 91041122 isPartOf "Microdevices".
- 91041122 issued "1992".
- 91041122 issued "c1992.".
- 91041122 language "eng".
- 91041122 publisher "New York : Plenum Press,".
- 91041122 subject "621.381/531 20".
- 91041122 subject "Ion beam lithography.".
- 91041122 subject "Lithography, Electron beam.".
- 91041122 subject "Physics.".
- 91041122 subject "TK7874 .V336 1992".
- 91041122 subject "X-ray lithography.".
- 91041122 title "The physics of submicron lithography / Kamil A. Valiev.".
- 91041122 type "text".