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- 91058429 contributor B6407411.
- 91058429 contributor B6407412.
- 91058429 created "c1991.".
- 91058429 date "1991".
- 91058429 date "c1991.".
- 91058429 dateCopyrighted "c1991.".
- 91058429 description "Includes bibliographical references and index.".
- 91058429 extent "vi, 362 p. :".
- 91058429 identifier "0791808637".
- 91058429 isPartOf "DSC (Series) ; v. 32.".
- 91058429 isPartOf "DSC ; vol. 32".
- 91058429 issued "1991".
- 91058429 issued "c1991.".
- 91058429 language "eng".
- 91058429 publisher "New York, N.Y. : ASME,".
- 91058429 subject "621.381 20".
- 91058429 subject "Actuators Congresses.".
- 91058429 subject "Detectors Congresses.".
- 91058429 subject "Microelectromechanical systems Congresses.".
- 91058429 subject "Microelectronics Congresses.".
- 91058429 subject "TK7874 .M4875 1991".
- 91058429 title "Micromechanical sensors, actuators, and systems : presented at the Winter Annual Meeting of the American Society of Mechanical Engineers, Atlanta, Georgia, December 1-6, 1991 / sponsored by the Dynamic Systems and Control Division, the Heat Transfer Division, and the Advanced Energy Systems Division, ASME ; edited by D. Cho ... [et al.].".
- 91058429 type "text".