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- 91060046 alternative "Tenth Annual Symposium on Microlithography.".
- 91060046 contributor B6408081.
- 91060046 contributor B6408082.
- 91060046 created "c1991.".
- 91060046 date "1991".
- 91060046 date "c1991.".
- 91060046 dateCopyrighted "c1991.".
- 91060046 description "Includes bibliographical references and index.".
- 91060046 extent "v, 315 p. :".
- 91060046 identifier "0819406058".
- 91060046 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1496.".
- 91060046 isPartOf "SPIE proceedings series ; v. 1496".
- 91060046 issued "1991".
- 91060046 issued "c1991.".
- 91060046 language "eng".
- 91060046 publisher "Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering,".
- 91060046 subject "621.381/52 20".
- 91060046 subject "Masks (Electronics) Congresses.".
- 91060046 subject "Microlithography Congresses.".
- 91060046 subject "Semiconductors Congresses.".
- 91060046 subject "TK7871.85 .S965 1990".
- 91060046 title "10th Annual Symposium on Microlithography : proceedings : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California / sponsored by Bacus International.".
- 91060046 type "text".