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- 91066812 contributor B6412204.
- 91066812 created "1991.".
- 91066812 date "1991".
- 91066812 date "1991.".
- 91066812 dateCopyrighted "1991.".
- 91066812 extent "xii, 75 p. :".
- 91066812 identifier "0309045975".
- 91066812 issued "1991".
- 91066812 issued "1991.".
- 91066812 language "eng".
- 91066812 publisher "Washington, D.C. : National Academy Press,".
- 91066812 subject "621.044 20".
- 91066812 subject "Microelectronics Materials Effect of radiation on.".
- 91066812 subject "Plasma engineering.".
- 91066812 subject "Surfaces (Technology)".
- 91066812 subject "TA2005 .N37 1991".
- 91066812 title "Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.".
- 91066812 type "text".