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- 91067489 contributor B6412765.
- 91067489 contributor B6412766.
- 91067489 created "c1991.".
- 91067489 date "1991".
- 91067489 date "c1991.".
- 91067489 dateCopyrighted "c1991.".
- 91067489 description "Includes bibliographical references and index.".
- 91067489 extent "vii, 240 p. :".
- 91067489 identifier "0819407291 (pbk.)".
- 91067489 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 1598".
- 91067489 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1598.".
- 91067489 issued "1991".
- 91067489 issued "c1991.".
- 91067489 language "eng".
- 91067489 publisher "Bellingham, Wash. : SPIE,".
- 91067489 subject "621.381 20".
- 91067489 subject "Lasers Industrial applications Congresses.".
- 91067489 subject "Microelectronics Congresses.".
- 91067489 subject "TK7874 .L316 1991".
- 91067489 title "Lasers in microelectronic manufacturing : 10-11 September 1991, San Jose, California / Bodil Braren, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 91067489 type "text".