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- 91067549 contributor B6412809.
- 91067549 contributor B6412810.
- 91067549 created "c1991.".
- 91067549 date "1991".
- 91067549 date "c1991.".
- 91067549 dateCopyrighted "c1991.".
- 91067549 description "Includes bibliographical references and index.".
- 91067549 extent "vii, 159 p. :".
- 91067549 identifier "0819407275 (pbk.)".
- 91067549 isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 1596".
- 91067549 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1596.".
- 91067549 issued "1991".
- 91067549 issued "c1991.".
- 91067549 language "eng".
- 91067549 publisher "Bellingham, Wash. : SPIE,".
- 91067549 subject "Integrated circuits Very large scale integration Reliability Congresses.".
- 91067549 subject "Integrated circuits Very large scale integration Testing Congresses.".
- 91067549 subject "Metallic films Congresses.".
- 91067549 subject "Metallizing Congresses.".
- 91067549 subject "TK7874 .M437 1991".
- 91067549 subject "Vapor-plating Congresses.".
- 91067549 title "Metallization : performance and reliability issues for VLSI and ULSI ; 12-13 September 1991, San Jose, California / Gennady S. Gildenblat, Gary P. Schwartz, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 91067549 type "text".