Matches in Library of Congress for { <http://lccn.loc.gov/91070972> ?p ?o. }
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- 91070972 contributor B6414565.
- 91070972 contributor B6414566.
- 91070972 contributor B6414567.
- 91070972 created "c1991.".
- 91070972 date "1991".
- 91070972 date "c1991.".
- 91070972 dateCopyrighted "c1991.".
- 91070972 description "Includes bibliographical references and indexes.".
- 91070972 extent "vii, 413 p. :".
- 91070972 isPartOf "Proceedings (Electrochemical Society) ; v. 91-5.".
- 91070972 isPartOf "Proceedings ; v. 91-5".
- 91070972 issued "1991".
- 91070972 issued "c1991.".
- 91070972 language "eng".
- 91070972 publisher "Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society,".
- 91070972 subject "621.381/5 20".
- 91070972 subject "Computer integrated manufacturing systems Congresses.".
- 91070972 subject "Electronic industries Automation Congresses.".
- 91070972 subject "Integrated circuits Design and construction Data processing Congresses.".
- 91070972 subject "TK7874 .S884 1990".
- 91070972 title "Proceedings of the Sixth Symposium on Automated Integrated Circuits Manufacturing / edited by Vaughn E. Akins, Hiroyuki Harada ; assistant editors, Robert Miller, Mihir Parikh.".
- 91070972 type "text".