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- 91075851 contributor B6418058.
- 91075851 contributor B6418059.
- 91075851 contributor B6418060.
- 91075851 created "c1991.".
- 91075851 date "1991".
- 91075851 date "c1991.".
- 91075851 dateCopyrighted "c1991.".
- 91075851 description "Includes bibliographical references and indexes.".
- 91075851 extent "xv, 924 p. :".
- 91075851 isPartOf "Proceedings (Electrochemical Society) ; v. 91-11".
- 91075851 isPartOf "Proceedings ; v. 91-11".
- 91075851 issued "1991".
- 91075851 issued "c1991.".
- 91075851 language "eng".
- 91075851 publisher "Pennington, NJ (10 S. Main St., Pennington 08534) : Electrochemical Society,".
- 91075851 subject "Integrated circuits Ultra large scale integration Congresses.".
- 91075851 subject "TK7874 .I4738 1991".
- 91075851 title "ULSI science and technology, 1991 : proceedings of the Third International Symposium on Ultra Large Scale Integration Science and Technology / edited by John M. Andrews, George K. Celler ; assistant editors, Wayne Bailey ... [et al.].".
- 91075851 type "text".