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- 91141871 contributor B6465311.
- 91141871 created "1990.".
- 91141871 date "1990".
- 91141871 date "1990.".
- 91141871 dateCopyrighted "1990.".
- 91141871 description "Includes bibliographical references (p. [106]-115).".
- 91141871 extent "115 p. :".
- 91141871 identifier "0387532366 (U.S.)".
- 91141871 isPartOf "IPA-IAO Forschung und Praxis ; Bd. 149".
- 91141871 issued "1990".
- 91141871 issued "1990.".
- 91141871 language "ger".
- 91141871 publisher "Berlin ; New York : Springer,".
- 91141871 subject "621.381/52 20".
- 91141871 subject "Electronic industries Automation.".
- 91141871 subject "Production engineering Data processing.".
- 91141871 subject "Semiconductors Design and construction.".
- 91141871 subject "TK7836 .S26 1990".
- 91141871 title "Werkstückbegleitender Informationsspeicher als Basis für ein informationstechnisches Konzept für Halbleiterfertigungen / Klaus-Dieter Sauter.".
- 91141871 type "text".